• DocumentCode
    1911972
  • Title

    Preparation of BaF/sub 2/ thin films for the application to MIS tunnel emitter

  • Author

    Usami, Kimiyoshi ; Takahashi, Isao ; Kobayashi, Takehiko ; Goto, Tetsu ; Goto, Tetsu

  • Author_Institution
    The University of Electro-Communications
  • fYear
    1994
  • fDate
    24-29 July 1994
  • Firstpage
    676
  • Lastpage
    676
  • Abstract
    Summary form only given. Ultrathin BaF/sub 2/films of less than 20nm thickness were deposited on the n-type Si
  • Keywords
    Crystallization; Elementary particle vacuum; Semiconductor diodes; Semiconductor films; Sputtering; Substrates; Surface morphology; Thermal resistance; Transistors; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
  • Conference_Location
    Seoul, Korea
  • Type

    conf

  • DOI
    10.1109/STSM.1994.836108
  • Filename
    836108
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1911972