Title :
Construction of an energy-saving semiconductor plant
Author :
Wakuda, Takahiro ; Nagata, Kenji ; Kojima, Motozou
Author_Institution :
Manuf. Coordination Div., NEC Corp., Tokyo, Japan
Abstract :
NEC Corp. has constructed an energy-saving semiconductor plant incorporating various energy-saving techniques for its electric power supply, air conditioning system, and heat source, including a cogeneration system, clean room air heating through use of waste heat from equipment cooling water, and free cleaning, in order to actively promote energy saving in semiconductor production. The new plant has successfully achieved a 18% reduction in energy consumption from the level in the existing plants
Keywords :
air conditioning; clean rooms; cogeneration; electronics industry; energy conservation; power consumption; waste-to-energy power plants; NEC Corporation plant; air conditioning system; chilled water supply; clean room air heating; cogeneration system; construction; electric power supply; energy consumption; energy-saving semiconductor plant; energy-saving techniques; equipment cooling water; free cleaning; heat source; optimum mix; power consumption reduction; waste heat; Air conditioning; Cleaning; Cogeneration; Cooling; National electric code; Power supplies; Production systems; Waste heat; Water heating; Water resources;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3752-2
DOI :
10.1109/ISSM.1997.664623
