DocumentCode :
1912389
Title :
A model for fast oxide thickness and surface concentration extraction for tunnel oxide capacitors
Author :
Haspeslagh, L. ; Vanhorebeek, G. ; Deferm, L.
Author_Institution :
IMEC, Leuven, Belgium
fYear :
1993
fDate :
13-16 Sept. 1993
Firstpage :
155
Lastpage :
158
Abstract :
This paper describes a model for extraction of oxide thickness and surface concentrations from HF-CV measurements. The accuracy of the model is evaluated by comparing the obtained results with values calculated by solving the Poisson and Gauss equations for a capacitor. It is shown that the model is suited for accurate extractions for layers with concentration between 1.1019 and 1.1020 cm-3.
Keywords :
Poisson equation; capacitors; Gauss equation; HF-CV measurements; Poisson equation; fast-oxide thickness; surface concentration extraction; tunnel oxide capacitors; Capacitance measurement; Capacitors; Electrodes; Equations; Gaussian processes; Interface states; Parameter extraction; Q measurement; Thickness measurement; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1993. ESSDERC '93. 23rd European
Conference_Location :
Grenoble
Print_ISBN :
2863321358
Type :
conf
Filename :
5435482
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1912389
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