• DocumentCode
    1912389
  • Title

    A model for fast oxide thickness and surface concentration extraction for tunnel oxide capacitors

  • Author

    Haspeslagh, L. ; Vanhorebeek, G. ; Deferm, L.

  • Author_Institution
    IMEC, Leuven, Belgium
  • fYear
    1993
  • fDate
    13-16 Sept. 1993
  • Firstpage
    155
  • Lastpage
    158
  • Abstract
    This paper describes a model for extraction of oxide thickness and surface concentrations from HF-CV measurements. The accuracy of the model is evaluated by comparing the obtained results with values calculated by solving the Poisson and Gauss equations for a capacitor. It is shown that the model is suited for accurate extractions for layers with concentration between 1.1019 and 1.1020 cm-3.
  • Keywords
    Poisson equation; capacitors; Gauss equation; HF-CV measurements; Poisson equation; fast-oxide thickness; surface concentration extraction; tunnel oxide capacitors; Capacitance measurement; Capacitors; Electrodes; Equations; Gaussian processes; Interface states; Parameter extraction; Q measurement; Thickness measurement; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1993. ESSDERC '93. 23rd European
  • Conference_Location
    Grenoble
  • Print_ISBN
    2863321358
  • Type

    conf

  • Filename
    5435482
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1912389