DocumentCode :
1912603
Title :
Microtechnologies for MEMs, MOEMs and Microsystems
Author :
Hauden, Daniel
Author_Institution :
University of Besancon, France
fYear :
1998
fDate :
8-10 Sept. 1998
Firstpage :
8
Lastpage :
17
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6
Type :
conf
Filename :
1503479
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1912603
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