Title :
Simulation of Mechanical Stresses during Shallow Trench Isolation Process
Author :
Poncet, Alain ; Bolt, Mike ; Barla, Kathy ; De Wolf, Ingrid
Author_Institution :
France Telecom, Meylan, France
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6
