DocumentCode

1913167

Title

Active Area Oxidation During the Densification of Shallow Trench Isolation for sub-0.25 micron CMOS

Author

Bazley, D.J. ; Jones, Sk ; Badenes, G.

Author_Institution

GEC-Marconi Materials Technolgy Ltd., Northants, UK

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

124

Lastpage

127

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

conf

Filename

1503504