Permalloy films on patterned silicon substrates

In this paper we study effect of patterning for ferromagnetic films in the case of deposition of continuous films on pre-patterned substrates. Striped structures with the different profile depth were fabricated using photolithography, ion etching and magnetron sputtering. Magnetic force microscopy (MFM), vibrating sample magnetometry (VSM) and ferromagnetic resonance (FMR) were applied to characterize the structures. Obtained results show that such patterned ferromagnetic structures can be interesting in a sense of application in planar microwave devices based on ferromagnetic films (such as notch filters, for example) for busting operational frequency in the case when magnetic filling factor (amount of the magnetic material interacting with microwaves) is important.