مرکز منطقه ای اطلاع رساني علوم و فناوري - 130nm Vertical PMOS Transistors with P+ Poly-Gate

DocumentCode :

1913514

Title :

130nm Vertical PMOS Transistors with P+ Poly-Gate

Author :

Schulz, T. ; Rosner, W. ; Risch, L. ; Aeugle, T. ; Langmann, U. ; Korbel, A.

Author_Institution :

Siemens AG, Munich, Germany

fYear :

1998

fDate :

8-10 Sept. 1998

Firstpage :

168

Lastpage :

171

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location :

Bordeaux, France

Print_ISBN :

2-86332-234-6

Type :

conf

Filename :

1503515

Link To Document :