Title :
Si-Based Resonant Cavity Photodetector with a Buried Oxide Reflector Using a Separation-by-Implantation-of-Oxygen Substrate
Author :
Seto, M. ; Sinnis, V.S. ; Morrison, A.P. ; Hoekstra, W. ; de Boer, W.B.
Author_Institution :
Philips Research Laboratories, Eindhoven, Netherlands
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location :
Bordeaux, France
Print_ISBN :
2-86332-234-6
