DocumentCode
1913785
Title
Investigations of the Thermal Behaviour of Low-k Dielectrics Based on Smart Designed Electromigration Lines
Author
Ionescu, A.M. ; Mondon, F. ; Reimbold, G. ; Blachier, D. ; Arnaud, L. ; Waltz, P. ; Morand, Y.
Author_Institution
LETI-CEA/Grenoble, France
fYear
1998
fDate
8-10 Sept. 1998
Firstpage
216
Lastpage
219
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Conference_Location
Bordeaux, France
Print_ISBN
2-86332-234-6
Type
conf
Filename
1503527
Link To Document