Long range passive wireless MEMS-based inclination or acceleration sensor utilizing the intermodulation communication principle

The intermodulation communication principle has recently been developed to wirelessly read out passive sensors´ data. The advantages over other passive wireless techniques include significant reading distances and the possibility of using different sensor elements while complying with frequency regulations. In this paper, we describe a MEMS-based passive wireless transponder relying on the intermodulation communication principle and applied to inclinometer or accelerometer measurements. The transponder operates at the UHF band and provides ± 1 g acceleration and ± 90 degrees inclination range within a reading distance of several meters.