MOSFET characteristics of ultra thin CVD Si3N4 gate dielectrics

Author

Song, S.C. ; Luan, H.F. ; Chen, Y.Y. ; Kwong, D.L. ; Gardener, Mark ; Fulford, Jim ; Allen, Mike

Author_Institution

The University of Texas, Austin, United States

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

232

Lastpage

235

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

Filename

1503531

Link To Document