مرکز منطقه ای اطلاع رساني علوم و فناوري - A Partially Depleted SOI CMOS-technology with advanced processing for 130 nm channel length

DocumentCode :

1914195

Title :

A Partially Depleted SOI CMOS-technology with advanced processing for 130 nm channel length

Author :

Pindl, S. ; Berthold, J. ; Huttner, T. ; Reif, S. ; Schumann, D. ; von Philipsborn, H.

Author_Institution :

Siemens AG, Munich, Germany

fYear :

1998

fDate :

8-10 Sept. 1998

Firstpage :

268

Lastpage :

271

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location :

Bordeaux, France

Print_ISBN :

2-86332-234-6

Type :

conf

Filename :

1503540

Link To Document :