مرکز منطقه ای اطلاع رساني علوم و فناوري - Rapid MOS-CV Generation Lifetime Mapping Technique for the Characterisation of High Quality Silicon

DocumentCode :

1914369

Title :

Rapid MOS-CV Generation Lifetime Mapping Technique for the Characterisation of High Quality Silicon

Author :

Sorge, R. ; Schley, P. ; Grabmeier, J. ; Obermeier, G. ; Huber, D. ; Richter, H.

Author_Institution :

Institute for Semiconductor Physics, Frankfurt (Oder), Germany

fYear :

1998

fDate :

8-10 Sept. 1998

Firstpage :

296

Lastpage :

299

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location :

Bordeaux, France

Print_ISBN :

2-86332-234-6

Type :

conf

Filename :

1503547

Link To Document :