DocumentCode
1914494
Title
Using PID algorithms for scaning probe microscopy
Author
Baiburin, Y.B. ; Bespalova, N.V. ; Volkov, Yu.P.
Author_Institution
Saratov State Tech. Univ., Saratov
fYear
2008
fDate
24-25 Sept. 2008
Firstpage
389
Lastpage
393
Abstract
This paper presents various algorithm of digital scanning probe microscopy probe-sample distance control. The characteristics of classical and modified proportional integral-differential algorithms (PID) were compared. The presented modified algorithm has been successfully tested in our digital scanning probe microscope control unit.
Keywords
physical instrumentation control; scanning probe microscopy; three-term control; PID control algorithm; digital scanning probe microscope control unit; digital scanning probe microscopy; probe-sample distance control; proportional integral-differential control algorithm; Helium; Scanning probe microscopy; Testing; Three-term control;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering, 2008. APEDE '08. International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4244-2121-3
Electronic_ISBN
978-1-4244-2122-0
Type
conf
DOI
10.1109/APEDE.2008.4720178
Filename
4720178
Link To Document