Title :
Using PID algorithms for scaning probe microscopy
Author :
Baiburin, Y.B. ; Bespalova, N.V. ; Volkov, Yu.P.
Author_Institution :
Saratov State Tech. Univ., Saratov
Abstract :
This paper presents various algorithm of digital scanning probe microscopy probe-sample distance control. The characteristics of classical and modified proportional integral-differential algorithms (PID) were compared. The presented modified algorithm has been successfully tested in our digital scanning probe microscope control unit.
Keywords :
physical instrumentation control; scanning probe microscopy; three-term control; PID control algorithm; digital scanning probe microscope control unit; digital scanning probe microscopy; probe-sample distance control; proportional integral-differential control algorithm; Helium; Scanning probe microscopy; Testing; Three-term control;
Conference_Titel :
Actual Problems of Electron Devices Engineering, 2008. APEDE '08. International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4244-2121-3
Electronic_ISBN :
978-1-4244-2122-0
DOI :
10.1109/APEDE.2008.4720178
