DocumentCode
1914538
Title
The ADEQUAT project for development and transfer of 0.25 μm logic CMOS modules
Author
De Keersmaecker, R. ; Félix, P. ; Haond, M. ; Janssen, G. ; Lorenz, J. ; Maes, H. ; Montrée, A. ; Rudan, M. ; Van den Hove, L.
Author_Institution
IMEC, Leuven, Belgium
fYear
1993
fDate
13-16 Sept. 1993
Firstpage
549
Lastpage
556
Abstract
The ADEQUAT project (Advanced DEvelopments for QUArter micron CMOS Technologies) aims at developing new device structures and process modules for the 0.25 μm CMOS logic generation offering improved performance with acceptable reliability while still meeting the manufacturability constraints. Several examples of choices illustrating this optimization process are presented together with the overall project organisation and roadmap.
Keywords
CMOS logic circuits; circuit optimisation; integrated circuit reliability; ADEQUAT project; CMOS logic generation; advanced developments; device structures; logic CMOS modules; optimization; process modules; project organisation; quarter micron CMOS technologies; reliability; roadmap; size 0.25 mum; CMOS logic circuits; CMOS process; CMOS technology; Coatings; Logic devices; Optical reflection; Packaging; Plasma temperature; Research and development; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1993. ESSDERC '93. 23rd European
Conference_Location
Grenoble
Print_ISBN
2863321358
Type
conf
Filename
5435561
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