مرکز منطقه ای اطلاع رساني علوم و فناوري - Optimization of Gate Oxide Recipes for 0.18 um CMOS Technology

DocumentCode :

1914750

Title :

Optimization of Gate Oxide Recipes for 0.18 um CMOS Technology

Author :

van Brandenburg, A.C.M.C. ; Stolk, P.A. ; Montree, A.H. ; de Boer, W.B. ; van Berkum, J.G.M.

Author_Institution :

Philips Research Laboratories, Eindhoven, Netherlands

fYear :

1998

fDate :

8-10 Sept. 1998

Firstpage :

356

Lastpage :

359

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location :

Bordeaux, France

Print_ISBN :

2-86332-234-6

Type :

conf

Filename :

1503562

Link To Document :