Design of Distributed MEMS Switch Based on Full - 3D Electromagnetic Simulator

Author

Simion, Stefan

Author_Institution

Dept. of Commun. & Comput. Sci., Mil. Tech. Acad., Bucharest

Volume

1

fYear

2005

fDate

21-24 Nov. 2005

Firstpage

531

Lastpage

534

Abstract

The paper presents a design procedure for a distributed switch consisting of an array of MEMSs (micro-electro-mechanical-systems) loading a CPW (coplanar waveguide). The MEMS equivalent circuit is developed from the scattering parameters obtained by using a full-3D electromagnetic simulator and then this equivalent circuit is used to design the switch. The designed switch consisting of 3 MEMSs are finally analyzed using again the electromagnetic simulator. The insertion losses are smaller than 0.1 dB, while the return loss and the isolation are higher than 20dB and 25dB, respectively, up to 25GHz. Also, the MEMS switching time is estimated by solving the MEMS dynamic equation, for step as well as for square wave voltage applied on the MEMS bridge, showing the influence of the voltage amplitude and the frequency on the switching time value

Keywords

S-parameters; circuit simulation; coplanar waveguides; electromagnetic devices; microswitches; 0.1 dB; 3D electromagnetic simulator; MEMS dynamic equation; coplanar waveguide; distributed MEMS switch; insertion losses; scattering parameters; square wave voltage; switching time value frequency; voltage amplitude; Circuit simulation; Coplanar waveguides; Electromagnetic waveguides; Equivalent circuits; Frequency estimation; Micromechanical devices; Microswitches; Scattering parameters; Switches; Voltage; Electromagnetic simulator; MEMS switch;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer as a Tool, 2005. EUROCON 2005.The International Conference on

Conference_Location

Belgrade

Print_ISBN

1-4244-0049-X

Type

conf

DOI

10.1109/EURCON.2005.1629982

Filename

1629982