Enhanced performance submicron n-type self-aligned HIGFET process using SiO2 spacers

Author

Touirat, M. ; Roger, M. ; Salmer, G. ; Ajram, Sami ; Fawaz, Hala

Author_Institution

I.E.M.N., Villeneuve d`Ascq, France

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

416

Lastpage

419

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

Filename

1503577

Link To Document