• DocumentCode
    1915188
  • Title

    CLEO®/Europe — IQEC 2013 durable, superhydrophobic, antireflection and low haze glass surfaces using scalable metal dewetting nanostructuring

  • Author

    Infante, D. ; Carrilero, A. ; Tulli, D. ; Koch, Karl W. ; Mazumder, Prasenjit ; Tian, L. ; Pruneri, V.

  • Author_Institution
    ICFO-Inst. de Cienc. Fotoniques, Castelldefels, Spain
  • fYear
    2013
  • fDate
    12-16 May 2013
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Nanostructures have been fabricated on a glass surface by reactive ion etching through a metallic nano-mask, refer to Figure 1. The metallic nano-mask is formed by dewetting ultrathin metal films (<;10nm thickness) subjected to rapid thermal annealing (RTA) [1].
  • Keywords
    glass; metallic thin films; nanofabrication; nanostructured materials; rapid thermal annealing; sputter etching; RTA; SiO2; antireflection; durability; low haze glass surfaces; metallic nanomask; nanostructures; rapid thermal annealing; reactive ion etching; scalable metal dewetting nanostructuring; superhydrophobicity; ultrathin metal films; Glass; Metals; Nanostructures; Optical surface waves; Substrates; Surface morphology; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
  • Conference_Location
    Munich
  • Print_ISBN
    978-1-4799-0593-5
  • Type

    conf

  • DOI
    10.1109/CLEOE-IQEC.2013.6800939
  • Filename
    6800939
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1915188