Title :
CLEO®/Europe — IQEC 2013 durable, superhydrophobic, antireflection and low haze glass surfaces using scalable metal dewetting nanostructuring
Author :
Infante, D. ; Carrilero, A. ; Tulli, D. ; Koch, Karl W. ; Mazumder, Prasenjit ; Tian, L. ; Pruneri, V.
Author_Institution :
ICFO-Inst. de Cienc. Fotoniques, Castelldefels, Spain
Abstract :
Nanostructures have been fabricated on a glass surface by reactive ion etching through a metallic nano-mask, refer to Figure 1. The metallic nano-mask is formed by dewetting ultrathin metal films (<;10nm thickness) subjected to rapid thermal annealing (RTA) [1].
Keywords :
glass; metallic thin films; nanofabrication; nanostructured materials; rapid thermal annealing; sputter etching; RTA; SiO2; antireflection; durability; low haze glass surfaces; metallic nanomask; nanostructures; rapid thermal annealing; reactive ion etching; scalable metal dewetting nanostructuring; superhydrophobicity; ultrathin metal films; Glass; Metals; Nanostructures; Optical surface waves; Substrates; Surface morphology; Surface treatment;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4799-0593-5
DOI :
10.1109/CLEOE-IQEC.2013.6800939
