Model of detection for a modulated conductivity sensor: application for a NOx gas sensor

Author

Gutiérrez, J. ; Arés, L. ; Robla, J.I. ; Sayago, I. ; Horrillo, M.C. ; Agapito, J.A.

Author_Institution

Lab. de Sensores, C.S.I.C., Madrid, Spain

fYear

1993

fDate

13-16 Sept. 1993

Firstpage

787

Lastpage

790

Abstract

The performance of a chemical gas sensor based on polycrystalline tin oxide films is strongly related to their structure, thickness and doping. In previous works we have studied the influence of the thickness on the detection by impedance spectroscopy analysis [1,2]. In the present work we have focused our attention in designing and modelizing a sensor for detection of NO_x for environmental applications. Reactive sputtered films with Al, In and Pt were characterized by complex impedance spectroscopy, Hall effect and d.c measurements.

Keywords

gas sensors; nitrogen compounds; DC measurements; Hall effect; NO_x; chemical gas sensor; complex impedance spectroscopy; environmental applications; impedance spectroscopy analysis; modulated conductivity sensor; polycristallyne tin oxide films; reactive sputtered films; Artificial intelligence; Chemical sensors; Conductivity; Doping; Electrochemical impedance spectroscopy; Gas detectors; Impedance measurement; Semiconductor process modeling; Sensor phenomena and characterization; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Device Research Conference, 1993. ESSDERC '93. 23rd European

Conference_Location

Grenoble

Print_ISBN

2863321358

Type

conf

Filename

5435608