Title :
Study of MoS2/SiC thin films on GCr15 steel substrate
Author :
Jiaming Ji ; Xiaojing Wang ; Honghong Shao ; Ji Wang
Author_Institution :
Sch. of Mater. Sci. & Eng., Jiangsu Univ., Zhenjiang, China
Abstract :
The MoS2/SiC thin films were deposited on GCr15 steel substrate using radio frequency magnetron sputtering technique. Surface morphology, components and mechanical properties of the films were investigated by scanning electron microscopy, energy spectrometer, friction and wear tester and scratch tester, respectively. It was found that the surface morphology of the MoS2/SiC films prepared on GCr15 steel substrate was vermicular. The SiC inner layer and the MoS2 outer layer were binded tightly with a smooth interface and the thickness of the films was about 0.8 μm. The films-substrate system exhibited excellent friction and wear properties with a mean friction coefficient of about 0.11. Interlayers added into the films can improve the cohesion from 21 N to 26 N.
Keywords :
X-ray chemical analysis; friction; molybdenum compounds; scanning electron microscopy; silicon compounds; sputter deposition; surface morphology; thin films; wear; wear testing; wide band gap semiconductors; MoS2-SiC; cohesion; energy spectrometer; film-substrate system; friction coefficient; friction tester; radio frequency magnetron sputtering; scanning electron microscopy; scratch tester; steel substrate; surface morphology; thin films; wear tester; Atomic layer deposition; Friction; Magnetic films; Silicon; Silicon carbide; MoS2/SiC films; cohesion; magnetron sputtering; mechanical properties; microstructure;
Conference_Titel :
Materials for Renewable Energy & Environment (ICMREE), 2011 International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-61284-749-8
DOI :
10.1109/ICMREE.2011.5930715
