Title :
A foundry fabricated surface-micromachined high-speed rotation sensor using wireless transmission
Author :
Sun, Winston ; Mei, Tao ; Li, Wen J.
Author_Institution :
Dept. of Mech. & Autom. Eng., Chinese Univ. of Hong Kong, Shatin, Hong Kong
Abstract :
A novel MEMS surface-micromachined non-contact high-speed rotation sensor with total surface area under 4 mm2 is now under development. Various versions of the sensor have been designed and were fabricated using the MCNC Multi-User MEMS Processes (MUMPs). This paper reports the initial characterization of the sensor and presents the results of transmitting the sensor data via a commercial wireless transmission chip. Initial results indicate that this piezoresistive sensor is capable of measuring rotation speeds from 1000 to 4000 rpm with linear output. The responsivity of the sensor is 3Hz/rpm in this region
Keywords :
angular measurement; electric sensing devices; micromachining; micromechanical devices; piezoelectric actuators; MEMS; Multi-User MEMS Processes; commercial wireless transmission chip; foundry fabricated surface-micromachined high-speed rotation sensor; piezoresistive sensor; responsivity; wireless transmission; Capacitive sensors; Foundries; Intelligent sensors; Mechanical sensors; Micromechanical devices; Pollution measurement; Rotation measurement; Sensor phenomena and characterization; Velocity measurement; Wireless sensor networks;
Conference_Titel :
Electron Devices Meeting, 1999. Proceedings. 1999 IEEE Hong Kong
Conference_Location :
Shatin
Print_ISBN :
0-7803-5648-9
DOI :
10.1109/HKEDM.1999.836411
