A foundry fabricated surface-micromachined high-speed rotation sensor using wireless transmission

Author

Sun, Winston ; Mei, Tao ; Li, Wen J.

Author_Institution

Dept. of Mech. & Autom. Eng., Chinese Univ. of Hong Kong, Shatin, Hong Kong

fYear

1999

fDate

1999

Firstpage

72

Lastpage

75

Abstract

A novel MEMS surface-micromachined non-contact high-speed rotation sensor with total surface area under 4 mm² is now under development. Various versions of the sensor have been designed and were fabricated using the MCNC Multi-User MEMS Processes (MUMPs). This paper reports the initial characterization of the sensor and presents the results of transmitting the sensor data via a commercial wireless transmission chip. Initial results indicate that this piezoresistive sensor is capable of measuring rotation speeds from 1000 to 4000 rpm with linear output. The responsivity of the sensor is 3Hz/rpm in this region

Keywords

angular measurement; electric sensing devices; micromachining; micromechanical devices; piezoelectric actuators; MEMS; Multi-User MEMS Processes; commercial wireless transmission chip; foundry fabricated surface-micromachined high-speed rotation sensor; piezoresistive sensor; responsivity; wireless transmission; Capacitive sensors; Foundries; Intelligent sensors; Mechanical sensors; Micromechanical devices; Pollution measurement; Rotation measurement; Sensor phenomena and characterization; Velocity measurement; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1999. Proceedings. 1999 IEEE Hong Kong

Conference_Location

Shatin

Print_ISBN

0-7803-5648-9

Type

conf

DOI

10.1109/HKEDM.1999.836411

Filename

836411