Title :
Atomistic Insights into Ultra-Shallow Junction Formation
Author :
Griffin, Peter B.
Author_Institution :
Stanford University, CA, USA
fDate :
11-13 September 2000
Keywords :
Annealing; Atomic layer deposition; Implants; Silicon;
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194718
