DocumentCode
1916878
Title
FeRAM Technology
Author
Mazuré, C.
Author_Institution
Infineon Technologies, Germany
fYear
2000
fDate
11-13 September 2000
Firstpage
64
Lastpage
67
Keywords
CMOS process; CMOS technology; Capacitors; Electrodes; Ferroelectric films; Ferroelectric materials; Nonvolatile memory; Plugs; Random access memory; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN
2-86332-248-6
Type
conf
DOI
10.1109/ESSDERC.2000.194719
Filename
1503649
Link To Document