Title :
A Micropower Front-End for Capacitive Microaccelerometers
Author :
Kämäräinen, Mika ; Saukoski, Mikko ; Halonen, Kari
Author_Institution :
Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo
Abstract :
This paper presents the measurement results of a micropower differential switched-capacitor front-end designed for capacitive microaccelerometers. Before considering the measurement results, the negative effects of the electrostatic forces are analysed. The designed front-end is capable of reducing these effects. Chopper stabilisation is used to decrease the offset voltage. The front-end was realised with a 0.13 ¿m CMOS process. The silicon area of the front-end is 0.325 mm2. The measurements show that the functionality of the front-end is in line with the theory and it achieves a 53.2 dB maximum SNR with 10 kHz sampling frequency. The worst case current consumption from a 1.8 V supply is 39 ¿A, when four masses are read.
Keywords :
CMOS integrated circuits; accelerometers; electrostatics; micromechanical devices; sampled data circuits; switched capacitor networks; 0.13 micron; 1.8 V; 10 kHz; 39 muA; CMOS process; capacitive microaccelerometers; chopper stabilisation; electrostatic force effect; micropower differential switched-capacitor; micropower front-end; offset voltage reduction; Acceleration; Accelerometers; CMOS process; Capacitance; Capacitors; Choppers; Electrostatic analysis; Electrostatic measurements; Frequency; Voltage;
Conference_Titel :
Norchip Conference, 2006. 24th
Conference_Location :
Linkoping, Sweden
Print_ISBN :
1-4244-0772-9
DOI :
10.1109/NORCHP.2006.329223
