Title :
Upconverting Capacitance-to-Voltage Converter for Readout of a Micromechanical Gyroscope
Author :
Aaltonen, Lasse ; Saukoski, Mikko ; Halonen, Kari
Author_Institution :
Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo
Abstract :
An upconverting front-end is implemented for readout of a bulk micromachined capacitive gyroscope. Detailed analysis of the integrated front-end, including the charge sensitive amplifier, high pass filters with gain and coherent amplitude detection is presented. Feasibility of the topology is compared to another realization of a continuous time front-end operating at the resonance frequency of the gyroscope. The spectral noise density of the implemented front-end is measured to be 0.11 aF/Hz1/2, when reduced to input capacitance. Functionality of a complete gyroscope is demonstrated with the reported front-end performing the capacitive readout
Keywords :
amplifiers; convertors; detector circuits; gyroscopes; high-pass filters; micromechanical devices; readout electronics; bulk micromachined capacitive gyroscope; capacitance-to-voltage converter; charge sensitive amplifier; coherent amplitude detection; high pass filters; micromechanical gyroscope readout; upconverting front-end; Capacitance measurement; Density measurement; Filters; Gyroscopes; Micromechanical devices; Noise measurement; Noise reduction; Resonance; Resonant frequency; Topology;
Conference_Titel :
Norchip Conference, 2006. 24th
Conference_Location :
Linkoping
Print_ISBN :
1-4244-0772-9
DOI :
10.1109/NORCHP.2006.329224
