Title :
The influence of silicon interstitial clusters on the Reverse Short Channel Effect
Author :
Tsamis, C. ; Tsoukalas, D. ; Tserepi, A. ; Tsoi, E.
Author_Institution :
NCSR Demokritos, Aghia Paraskevi, Greece
fDate :
11-13 September 2000
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194742
