DocumentCode
1918118
Title
Electrodynamic models of resonator sensors in microwave diagnostics of semiconductors
Author
Gordienko, Yuri Y. ; Ryabukhin, Aleksey A. ; Slipchenko, Nicolay I.
Author_Institution
Kharkiv Nat. Univ. of Radioelectronics, Ukraine
fYear
2002
fDate
2002
Firstpage
100
Abstract
The paper is dedicated to electrodynamic models of resonator sensors, which are used in microwave diagnostics of semiconductors. Research results are compared using exact and approximate models. The field of use of the latter for description of resonator sensors of capacitive type is determined.
Keywords
capacitive sensors; microwave detectors; resonators; semiconductors; capacitive-type resonator sensor; electrodynamic model; microwave diagnostics; semiconductor; Apertures; Capacitive sensors; Coaxial components; Electrodynamics; Electromagnetic fields; Electromagnetic modeling; Integral equations; Maxwell equations; Microwave sensors; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2002. Proceedings of the International Conference
Print_ISBN
966-553-234-0
Type
conf
DOI
10.1109/TCSET.2002.1015874
Filename
1015874
Link To Document