Title :
Electrodynamic models of resonator sensors in microwave diagnostics of semiconductors
Author :
Gordienko, Yuri Y. ; Ryabukhin, Aleksey A. ; Slipchenko, Nicolay I.
Author_Institution :
Kharkiv Nat. Univ. of Radioelectronics, Ukraine
Abstract :
The paper is dedicated to electrodynamic models of resonator sensors, which are used in microwave diagnostics of semiconductors. Research results are compared using exact and approximate models. The field of use of the latter for description of resonator sensors of capacitive type is determined.
Keywords :
capacitive sensors; microwave detectors; resonators; semiconductors; capacitive-type resonator sensor; electrodynamic model; microwave diagnostics; semiconductor; Apertures; Capacitive sensors; Coaxial components; Electrodynamics; Electromagnetic fields; Electromagnetic modeling; Integral equations; Maxwell equations; Microwave sensors; Sensor phenomena and characterization;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2002. Proceedings of the International Conference
Print_ISBN :
966-553-234-0
DOI :
10.1109/TCSET.2002.1015874
