Title :
FEM model of thermoelectric sensor sensitive element based on silicon whiskers
Author :
Druzhinin, Anatoly ; Pankov, Yuny ; Matvienko, Sergey
Author_Institution :
Dept. of Semicond. Electron., Lviv Polytech. Nat. Univ., Ukraine
Abstract :
The computer model for simulation of temperature fields in a sensitive element on the basis of p-type silicon whiskers is created by the numerical solution of the heat equation by the finite element method (FEM). The results may be used to estimate temperature perturbations in various microsensors based on Seebeck and other thermo-kinetic effects in non-uniform temperature fields.
Keywords :
Seebeck effect; elemental semiconductors; finite element analysis; microsensors; silicon; temperature distribution; thermoelectric devices; whiskers (crystal); FEM model; Seebeck effect; Si; computer simulation; heat equation; microsensor; p-type silicon whisker; sensitive element; temperature field; thermo-kinetic effect; thermoelectric sensor; Equations; Finite element methods; Intelligent sensors; Mechanical sensors; Microsensors; Piezoelectric materials; Silicon; Temperature sensors; Thermal sensors; Thermoelectricity;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2002. Proceedings of the International Conference
Print_ISBN :
966-553-234-0
DOI :
10.1109/TCSET.2002.1015879
