DocumentCode
1918222
Title
FEM model of thermoelectric sensor sensitive element based on silicon whiskers
Author
Druzhinin, Anatoly ; Pankov, Yuny ; Matvienko, Sergey
Author_Institution
Dept. of Semicond. Electron., Lviv Polytech. Nat. Univ., Ukraine
fYear
2002
fDate
2002
Firstpage
110
Lastpage
111
Abstract
The computer model for simulation of temperature fields in a sensitive element on the basis of p-type silicon whiskers is created by the numerical solution of the heat equation by the finite element method (FEM). The results may be used to estimate temperature perturbations in various microsensors based on Seebeck and other thermo-kinetic effects in non-uniform temperature fields.
Keywords
Seebeck effect; elemental semiconductors; finite element analysis; microsensors; silicon; temperature distribution; thermoelectric devices; whiskers (crystal); FEM model; Seebeck effect; Si; computer simulation; heat equation; microsensor; p-type silicon whisker; sensitive element; temperature field; thermo-kinetic effect; thermoelectric sensor; Equations; Finite element methods; Intelligent sensors; Mechanical sensors; Microsensors; Piezoelectric materials; Silicon; Temperature sensors; Thermal sensors; Thermoelectricity;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2002. Proceedings of the International Conference
Print_ISBN
966-553-234-0
Type
conf
DOI
10.1109/TCSET.2002.1015879
Filename
1015879
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