• DocumentCode
    1918437
  • Title

    Capacitor Test Structures for C-V Measurements on CMOS Devices with Sub-20 Å Oxides

  • Author

    Ahmed, K. ; Ibok, E. ; Hauser, J.

  • Author_Institution
    Conexant Systems, Inc., Newport Beach, CA, USA
  • fYear
    2000
  • fDate
    11-13 Sept. 2000
  • Firstpage
    308
  • Lastpage
    311
  • Keywords
    Attenuation; Capacitance measurement; Capacitance-voltage characteristics; Contact resistance; Electrical resistance measurement; MOS capacitors; Parasitic capacitance; Strontium; Testing; Tunneling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2000. Proceeding of the 30th European
  • Conference_Location
    Cork, Ireland
  • Print_ISBN
    2-86332-248-6
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2000.194776
  • Filename
    1503706
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1918437