Title :
Characterisation of Mechanical Stress in Advanced PBL Isolation
Author :
Jones, S.K. ; Ahmed, M ; Rothwell, W.J. ; De Wolf, I ; Deferm, L
Author_Institution :
GEC-Marconi Materials Technology Ltd, Caswell, Towcester, Northants NN12 8EQ, UK
Abstract :
The characterisation of 1D and 2D stress distributions in poly-buffered LOCOS (PBL) isolation structures for using Micro-Raman mapping with TEM measurements of topography is presented. Measurements have been made on devices produced within the development of 0.35 ¿m cmos isolation modules.
Keywords :
Compressive stress; Geometrical optics; Geometry; Mechanical variables measurement; Oxidation; Probes; Spatial resolution; Stress measurement; Surfaces; Tensile stress;
Conference_Titel :
Solid State Device Research Conference, 1994. ESSDERC '94. 24th European
Conference_Location :
Edinburgh, Scotland
