DocumentCode
1918838
Title
Electrical Properties of 0.1 μm and Sub-0.1 μm Single-Drain and LDD MOSFETs from Room to Liquid Helium Temperatures
Author
Balestra, F. ; Tsuno, M. ; Matsumoto, T. ; Koyanagi, M.
Author_Institution
Faculty of Engineering, Tohoku University, Aramaki, Aoba-ku, Sendai 980, Japan; Laboratoire de Physique des Composants a Semiconducteurs (URA-CNRS), Institut National Polytechnique de Grenoble, ENSERG - BP 257, 38016 Grenoble, France
fYear
1994
fDate
11-15 Sept. 1994
Firstpage
321
Lastpage
324
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1994. ESSDERC '94. 24th European
Conference_Location
Edinburgh, Scotland
Print_ISBN
0863321579
Type
conf
Filename
5435727
Link To Document