Electro-Thermo-Mechanical Field Analysis using SESES

We describe our simulation framework for coupled electro-thermo-mechanical (ETM) analysis of miniaturized transducers and electronic devices. The package is tailored to the specific requirements of micro-electro-mechanical structure design. It achieves high computational accuracy and performance on engineering workstations through the use of an automatic mesh adaptation algorithm [1]. A zone-coupling scheme allows for a considerable reduction of degrees of freedom (Dofs). A fast linear solver coupled with near-optimal finite element data structures enables the solution of complex devices with up to 100,000 finite elements on a workstation.