Title :
Application of CFDRC software for modeling of chosen microstructures
Author :
Lobur, Myhaylo ; Napieralski, Andrzej ; Sviridova, Tatyana
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Ukraine
Abstract :
The main goal of this paper is to present the design of comb-finger micro-electro-mechanical resonators with not equal outer and inner beams by using modern CAD tools. The basic principles of operating of resonators and basic technological issues are briefly discussed. At the end of paper there are some general conclusions.
Keywords :
CAD; micromechanical resonators; CAD tool; CFDRC software; comb-finger micro-electro-mechanical resonator; design technology; microstructure modeling; Application software; Band pass filters; Magnetic separation; Microcavities; Microelectronics; Micromechanical devices; Microstructure; Resonance; Resonator filters; Springs;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2002. Proceedings of the International Conference
Print_ISBN :
966-553-234-0
DOI :
10.1109/TCSET.2002.1015908
