DocumentCode
1919038
Title
Application of CFDRC software for modeling of chosen microstructures
Author
Lobur, Myhaylo ; Napieralski, Andrzej ; Sviridova, Tatyana
Author_Institution
CAD Dept., Lviv Polytech. Nat. Univ., Ukraine
fYear
2002
fDate
2002
Firstpage
172
Lastpage
175
Abstract
The main goal of this paper is to present the design of comb-finger micro-electro-mechanical resonators with not equal outer and inner beams by using modern CAD tools. The basic principles of operating of resonators and basic technological issues are briefly discussed. At the end of paper there are some general conclusions.
Keywords
CAD; micromechanical resonators; CAD tool; CFDRC software; comb-finger micro-electro-mechanical resonator; design technology; microstructure modeling; Application software; Band pass filters; Magnetic separation; Microcavities; Microelectronics; Micromechanical devices; Microstructure; Resonance; Resonator filters; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2002. Proceedings of the International Conference
Print_ISBN
966-553-234-0
Type
conf
DOI
10.1109/TCSET.2002.1015908
Filename
1015908
Link To Document