Micro object handling system with concentrated visual fields and new handling skills

This paper proposes a system design concept of a “concentrated visual field” for micro object handling. The proposed concept features: (1) multiple microscopes, (2) fields of view concentrated on manipulators´ work space and (3) rotational DOF for tilting manipulators and a worktable. Micro Object Handling System II, which consists of two microscopes (a scanning electron microscope and an optical microscope), two manipulators (primary and secondary) and a worktable, is constructed based on the design concept. The primary manipulator is equipped with two rotational DOFs, and three highly precise translational DOFs. The secondary manipulator is utilized to fix objects on the worktable. The paper also proposes new micro object handling skills to control the adhesive forces which are crucial for micro manipulation. These skills features: (1) graspless handling of an object by a needlelike tool, (2) changing adhesive force between a tool and an object by changing the contact area between them, and (3) cooperating two tools whose adhesive-forces differ. Several micro object handling experiments were successfully performed by the system to prove the feasibility of the new handling skills and the system effectiveness