DocumentCode
1919172
Title
Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source
Author
Isai, G.I. ; Kovalgin, A.Y. ; Holleman, J. ; Woerlee, P.H. ; Wallinga, H. ; Cobianu, C.
Author_Institution
University of Twente, Enschede, The Netherlands
fYear
2000
fDate
11-13 September 2000
Firstpage
424
Lastpage
427
Keywords
Cyclotrons; Dielectric substrates; Electrons; Plasma measurements; Plasma properties; Plasma sources; Plasma temperature; Pollution measurement; Resonance; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN
2-86332-248-6
Type
conf
DOI
10.1109/ESSDERC.2000.194805
Filename
1503735
Link To Document