Title :
R&D of Micromechanical Element Manufacturing Processes for Microwave Devices
Author :
Timoshenkov, S.P. ; Kalugin, V.V. ; Klochko, V.A. ; Kalugina, V.I. ; Zotov, A.S. ; Prokop´ev, E.P.
Author_Institution :
Technical Univ., Moscow
Abstract :
Results of R&D into micromechanical element (MME) manufacturing processes for microelectromechanical system (MEMS) applications in microwave devices are discussed. Processes of silicon and glass wafer treatment at various stages of MME MEMS manufacture are described.
Keywords :
micromechanical devices; semiconductor device manufacture; superconducting microwave devices; glass wafer treatment; microelectromechanical system; micromechanical element manufacturing processes; microwave devices; silicon wafer treatment; Aluminum; Glass; Gold; Manufacturing processes; Micromechanical devices; Microwave devices;
Conference_Titel :
Microwave & Telecommunication Technology, 2007. CriMiCo 2007. 17th International Crimean Conference
Conference_Location :
Crimea
Print_ISBN :
978-966-335-012-7
DOI :
10.1109/CRMICO.2007.4368836
