Title :
Measurement of Nanometer Metal Layers using Waveguide Photonic Structures
Author :
Usanov, D. ; Skripal, A. ; Abramov, Andrey ; Bogolubov, A. ; Skvortsov, Vladimir ; Merdanov, M.
Author_Institution :
Saratov State Univ., Saratov
Abstract :
The possibility of using waveguide photonic structures for measuring parameters of nanometer metal layers on dielectric structures has been investigated.
Keywords :
waveguide theory; dielectric structures; nanometer metal layers measurement; parameter measurement; waveguide photonic structures; Aluminum oxide; Ceramics; Photonic crystals; Plastics; Reflection;
Conference_Titel :
Microwave & Telecommunication Technology, 2007. CriMiCo 2007. 17th International Crimean Conference
Conference_Location :
Crimea
Print_ISBN :
978-966-335-012-7
DOI :
10.1109/CRMICO.2007.4368846
