• DocumentCode
    1919552
  • Title

    Measurement of Nanometer Metal Layers using Waveguide Photonic Structures

  • Author

    Usanov, D. ; Skripal, A. ; Abramov, Andrey ; Bogolubov, A. ; Skvortsov, Vladimir ; Merdanov, M.

  • Author_Institution
    Saratov State Univ., Saratov
  • fYear
    2007
  • fDate
    10-14 Sept. 2007
  • Firstpage
    549
  • Lastpage
    550
  • Abstract
    The possibility of using waveguide photonic structures for measuring parameters of nanometer metal layers on dielectric structures has been investigated.
  • Keywords
    waveguide theory; dielectric structures; nanometer metal layers measurement; parameter measurement; waveguide photonic structures; Aluminum oxide; Ceramics; Photonic crystals; Plastics; Reflection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2007. CriMiCo 2007. 17th International Crimean Conference
  • Conference_Location
    Crimea
  • Print_ISBN
    978-966-335-012-7
  • Type

    conf

  • DOI
    10.1109/CRMICO.2007.4368846
  • Filename
    4368846
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1919552