Title :
P2–10: Densely populated small CNT clusters for electron field emission
Author_Institution :
Zelect Tech, Centennial, CO, USA
Abstract :
In this paper, we will present a cathode film with a configuration of spaced and densely populated small CNT clusters. Depending on the particular process to be described here and the desired application, randomly located clusters ranging from 1-2 μm in size with densities > 106/cm2 to single or a few CNTs with densities > 107/cm2 can be fabricated. Combined with optimal growth conditions, these films emit electrons readily at low threshold field, and are stable, uniform and robust. The fabrication process is compatible with microfabrication processes as well as vacuum tube processing, and can be scaled to large areas. Integrated gate aperture can be fabricated using a self aligned approach around each of these random and densely populated small clusters and a focus grid can be further added onto the wafer for electron beam control.
Keywords :
carbon nanotubes; electron field emission; cathode film; densely populated small CNT clusters; electron beam control; electron field emission; microfabrication processes; vacuum tube processing; Apertures; Carbon nanotubes; Cathodes; Electron tubes; Films; Logic gates; Robustness; CNT cluster; CNT growth; Carbon nanotube; electron field emission;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
Conference_Location :
Palo Alto, CA
Print_ISBN :
978-1-4244-7889-7
Electronic_ISBN :
978-1-4244-7888-0
DOI :
10.1109/IVNC.2010.5563156