DocumentCode :
1919893
Title :
Analysing Antenna Ratio Dependence of Plasma Charging Damage with Weibull Breakdown Statistics
Author :
Van den Bosch, Geert ; Creusen, Martin ; Degraeve, Robin ; Kaczer, Ben ; Groeseneken, Guido
Author_Institution :
IMEC, Leuven, Belgium
fYear :
2000
fDate :
11-13 September 2000
Firstpage :
528
Lastpage :
531
Keywords :
Antenna theory; CMOS technology; Circuit testing; Electric breakdown; Plasma measurements; Plasma properties; Plasma simulation; Statistical analysis; Statistics; Tunneling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
Type :
conf
DOI :
10.1109/ESSDERC.2000.194831
Filename :
1503761
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1919893
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