DocumentCode
1919936
Title
Dielectric pockets – a new concept of the junctions for deca-nanometric CMOS devices
Author
Jurczak, M. ; Skotnicki, T. ; Monfray, S. ; Gwoziecki, R. ; Paoli, Mario ; Tormen, B. ; Ribot, P. ; Dutartre, D. ; Galvier, J.
Author_Institution
Warsaw University of Technology, Poland
fYear
2000
fDate
11-13 Sept. 2000
Firstpage
536
Lastpage
539
Keywords
CMOS technology; Dielectric devices; Dielectric substrates; Doping; Epitaxial growth; Etching; MOS devices; Microelectronics; Telecommunications; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Conference_Location
Cork, Ireland
Print_ISBN
2-86332-248-6
Type
conf
DOI
10.1109/ESSDERC.2000.194833
Filename
1503763
Link To Document