P1–17: Controlled synthesis of Au and Ag/Au nanoparticles for fabrication of n-doped amorphous Si nanowire field emission cathode

A technique was reported on controlled synthesis of Au and Au/Ag nanoparticles using thermal (500°C) annealing of Au thin film and Ag/Au bilayer. The density of the nanoparticles can be adjusted in a range of 2.8×10⁹ cm^-2 to 6.2×10¹⁰ cm^-2. The nanoparticles were used as masks for fabrications of vertically aligned amorphous Si nanowires (a-SiNWs) using dry etching. The mechanisms on the density control of Au, Ag/Au nanoparticles and the etching processes of the amorphous Si were discussed.