Title :
P1–14: Collimation properties of molded molybdenum field emitters
Author :
Helfenstein, Patrick ; Kirk, Eugenie ; Jefimovs, Konstantins ; Vogel, Thomas ; Escher, Conrad ; Fink, Hans-Werner ; Tsujino, Soichiro
Author_Institution :
Lab. for Micro- & Nanotechnol., Paul Scherrer Inst., Villigen, Switzerland
Abstract :
We studied field electron emission properties of double-gate molybdenum field emitter arrays (FEA) with stacked gates of different aperture diameters. The collimation gate aperture was formed using a focused ion-beam (FIB) assisted process. This has the advantage of the aperture diameter as well as its geometry being precisely definable. Using a field-electron microscope, a reduction of the emission angle by a factor 9-10 was demonstrated.
Keywords :
field emission electron microscopy; field emitter arrays; molybdenum; FIB assisted process; collimation properties; double-gate molybdenum field emitter arrays; field-electron microscope; focused ion-beam; geometry; Apertures; Cathodes; Electron beams; Fabrication; Field emitter arrays; Logic gates; Voltage measurement; double-gate field emitter array; electron beam collimation; electron optics; field electron emission; field emitter array; focused ion beam; molding method;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
Conference_Location :
Palo Alto, CA
Print_ISBN :
978-1-4244-7889-7
Electronic_ISBN :
978-1-4244-7888-0
DOI :
10.1109/IVNC.2010.5563185
