Title :
9.4: The effect of ballast resistor and field screening on electron emission of nano-diamond emitters fabricated on micropatterned silicon pillar arrays
Author :
Ghosh, Nikkon ; Kang, Weng Poo ; Raina, Supil ; Davidson, Jim
Author_Institution :
Dept. of Electr. Eng., Vanderbilt Univ., Nashville, TN, USA
Abstract :
This paper describes the influence of ballast resistor and field screening on the electron field emission behavior of nano-diamond emitter arrays fabricated on micropatterned silicon pillars. Arrays of 50 × 50 silicon pillars with different ballast resistances, pillar separations, capped with nano-diamond, have been fabricated on different silicon substrates as cathode for field emission testing. The goal of this study is to evaluate the fabrication method and electron emission characteristics in this configuration for field emission applications. The electron field emission results have been compared to observe the effect of the ballast resistive behavior and array spacing of micropatterned silicon pillars on the nano-diamond field emission behaviors.
Keywords :
cathodes; electron emission; nanofabrication; sputter etching; ballast resistor; electron emission; field screening; micropatterned silicon pillar arrays; nanodiamond emitter arrays; nanodiamond field emission behaviors; Diamond-like carbon; Electric fields; Electronic ballasts; Fabrication; Nanostructures; Silicon; Substrates; ballast resistor; deep reactive ion etching; field emission; field screening; ridge-structured nano-diamond; silicon pillar array;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
Conference_Location :
Palo Alto, CA
Print_ISBN :
978-1-4244-7889-7
Electronic_ISBN :
978-1-4244-7888-0
DOI :
10.1109/IVNC.2010.5563190