Title :
Optimized design and fabrication of a wireless pressure and temperature sensor unit based on SAW transponder technology
Author :
Schimetta, G. ; Dollinger, F. ; Scholl, Gerd ; Weigel, R.
Author_Institution :
Inst. for Commun. & Inf. Eng., Johannes Kepler Univ., Linz, Austria
Abstract :
The optimized design and fabrication of a passive pressure and temperature sensor unit based on SAW transponder technology fully meeting the restrictions of the European ISM RF band at 433.92 MHz is presented. The sensor unit consists of a reflective SAW delay line which is used as temperature sensor and transponder, and a capacitive pressure sensor. With a special arrangement of the impedance loaded splitfinger interdigital transducer, and the reference reflectors on the SAW substrate, a temperature corrected evaluation of the pressure signal is enabled. Due to the small dimensions and cost-effective design of the sensor unit, the utilization as a tire pressure sensor is proposed. A prototype of the SAW delay line and the micromachined pressure sensor is demonstrated.
Keywords :
compensation; interdigital transducers; micromachining; microsensors; pressure sensors; surface acoustic wave delay lines; surface acoustic wave transducers; temperature sensors; transponders; SAW transponder technology; SPUDT; capacitive pressure sensor; compensation; cost-effective design; fabrication; impedance loaded splitfinger IDT; micromachined pressure sensor; optimized design; passive sensors; reference reflectors; reflective SAW delay line; small dimensions; temperature corrected evaluation; temperature sensor; time domain based analysis; tire pressure sensor; wireless sensor unit; Capacitive sensors; Delay lines; Design optimization; Fabrication; Impedance; Radio frequency; Surface acoustic waves; Temperature sensors; Transponders; Wireless sensor networks;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.966905
