Title :
Deposition and properties of PLT thin films by magnetron sputtering from powder target
Author :
Luo, Wei-Gen ; Ding, Ai-Li ; Zhang, Rui-Tao ; Huang, Yu-Hong ; Ge, Min
Author_Institution :
Shanghai Inst. of Ceramics, Chinese Acad. of Sci., China
fDate :
30 Aug-2 Sep 1992
Abstract :
The processes, structures, and electrooptical properties of lanthanum-modified lead titanate (PLT) thin films prepared by RF magnetron sputtering from sintered powder targets were studied. Highly oriented PLT thin films on glass and (0001) Al2O3 substrate, and epitaxial PLT thin films and (100) SrTiO3 have been deposited. The growth mechanism of oriented PLT thin film on amorphous glass is discussed. The electrooptical coefficient (R>0.6×10-16 m2/v2) of PLT films on glass was measured by a method based on the Faraday magnetooptical effect
Keywords :
Faraday effect; electro-optical effects; epitaxial layers; ferroelectric thin films; lanthanum compounds; lead compounds; sputter deposition; sputtered coatings; (PbLa)TiO3; Al2O3 substrate; Faraday magnetooptical effect; SrTiO3; amorphous glass; electrooptical coefficient; electrooptical properties; epitaxial (Pb,La)TiO3 thin films; growth mechanism; powder target; radiofrequency magnetron sputtering; Amorphous magnetic materials; Amorphous materials; Glass; Magnetic properties; Powders; Radio frequency; Sputtering; Substrates; Titanium compounds; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
Conference_Location :
Greenville, SC
Print_ISBN :
0-7803-0465-9
DOI :
10.1109/ISAF.1992.300611
