DocumentCode
1920683
Title
Room-Temperature Electroluminescence from Er-Implanted Semi-Insulating Polycrystalline Silicon
Author
Lombardo, S. ; Campisano, S.U. ; van den Hoven, G.N. ; Polman, A.
Author_Institution
Dipartimento di Fisica della Universitá, Corso Italia, 57, I 95129 Catania Italy.
fYear
1994
fDate
11-15 Sept. 1994
Firstpage
657
Lastpage
660
Abstract
Sharp room-temperature luminescence at 1.54 ¿m in erbium-doped semi-insulating polycrystalline silicon (SIPOS) is demonstrated. Electroluminescence due to intra-4f transitions of Er3+ ions was investigated in metal-SIPOS-silicon devices. The compatibility of SIPOS with VLSI technology combined with the demonstration that Er in SIPOS can be electrically excited, indicates that Er-doped SIPOS is a very interesting candidate as active material for electrically stimulated light emission in silicon-based opto-electronics.
Keywords
Annealing; Electroluminescence; Erbium; Luminescence; Optical films; Optical materials; Particle beam optics; Photoluminescence; Silicon; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1994. ESSDERC '94. 24th European
Conference_Location
Edinburgh, Scotland
Print_ISBN
0863321579
Type
conf
Filename
5435802
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