Title :
4.5: Low energy electron source panel with carbon nanotube
Author :
Zhao, Weijiang ; Manabe, Tomoya ; Abo, Satoshi ; Takai, Mikio
Author_Institution :
I/I Bus. Center, Nissin Ion, Equip. Co., Ltd., Kyoto, Japan
Abstract :
A low energy electron source panel with a carbon nanotube (CNT) cathode with a size of 50 × 50 mm2 including extraction and deceleration electrodes to extract electrons from CNTs and decelerate them to a low energy, such as several eV, has been developed. The simulation result of this electron panel and the basic electron emission properties are described.
Keywords :
carbon nanotubes; cathodes; electron sources; carbon nanotube; cathode; deceleration electrodes; electron emission properties; extraction electrodes; low energy electron source panel; Anodes; Carbon nanotubes; Cathodes; Electron emission; Electron sources; Simulation; Low energy; UV laser; carbon nanotubes (CNTs); electron source panel; transmittance;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
Conference_Location :
Palo Alto, CA
Print_ISBN :
978-1-4244-7889-7
Electronic_ISBN :
978-1-4244-7888-0
DOI :
10.1109/IVNC.2010.5563212