Title :
Post-Process CMOS Front End Engineering With Focused Ion Beams
Author :
Lugstein, A. ; Brezna, W. ; Goebel, B. ; Palmetshofer, L. ; Bertagnolli, E.
Author_Institution :
Technical University, Vienna, Austria
fDate :
24-26 September 2002
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194882
