DocumentCode

1921162

Title

Post-Process CMOS Front End Engineering With Focused Ion Beams

Author

Lugstein, A. ; Brezna, W. ; Goebel, B. ; Palmetshofer, L. ; Bertagnolli, E.

Author_Institution

Technical University, Vienna, Austria

fYear

2002

fDate

24-26 September 2002

Firstpage

111

Lastpage

114

Keywords

Ion beams;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN

88-900847-8-2

Type

conf

DOI

10.1109/ESSDERC.2002.194882

Filename

1503812